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The terahertz spectrum of matter contains many physical and chemical information
Insensitive to blackbody radiation, high signal-to-noise ratio, stable measurement
Low-energy electromagnetic waves that do not harm biological tissues
Pass many common materials, suitable for non-destructive testing
Using the XPS array made of metamaterials combined with the design of the microchannel, a small chip can be used with terahertz technology to analyze the object
After the terahertz radiation penetrates the microchannel of the wafer and is filled with different substances, it can be seen that its spectrum is significantly different and has a specific waveform
