Equipment model:

SPB-U668 Aluminum Wire Machine

Pad size is 70μm*70μm more

The biosensor is based on a theory of “Shear Horizontal Mode Surface Acoustic Wave. SH-SAW is a high sensitivity biosensor having 36°YX-LiTaO3 as a piezoelectric material fabricated using lithography process.  The biosensor can detect the signal by using the frequency shift of surface acoustic wave and result as the amount of biomolecule bindings in graphs.